XUUS – HHG source for EUV and soft X-ray
Product page ↗Explore the XUUS, a table-top ultrafast EUV light source with tunable wavelengths and high stability for advanced applications in imaging, spectroscopy, lithography, and metrology.
| Datasheet | |
|---|---|
| EUV XUUS Source Specifications | Wavelength Range (~0.8µm pump) |
| Flux | Up to 1013 ph/s |
| Beam Height | 4.5” (1114.3 mm) |
| Dimensions (mm) | 1200 L x 330 W x176 H |
| Photocurrent corresponding to the EUV spectrum | centered at 13 nm (see next page) |
| Helium gas, driven by RAEA II, is used to | generate the 13.5nm output. |