EV Group (EVG)
Imec and EV Group demonstrate wafer-to-wafer hybrid bonding with 200nm interconnect pitch
Overview
EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection s
Products & capabilities
- Lithography
- Bonding
- Metrology
- Process Development Services
- IR LayerRelease™ Technology
- MLE™ - Maskless Exposure Technology
Applications & markets
Services
- Deutsch (DE)
- EV Group
- Process Technology
- Customer Support
- Related downloads
- EVG Process Services Flyer - 0.79 MB
- EVG Academy Flyer - 1.17 MB
- Send an E-Mail
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